X-ray lithography
id:
x-ray-lithography-232-3997963
title:
X-ray lithography
text:
X-ray lithography is a process used in semiconductor device fabrication industry to selectively remove parts of a thin film of photoresist. It uses X-rays to transfer a geometric pattern from a mask to a light-sensitive chemical photoresist, or simply "resist," on the substrate to reach extremely small topological size of a feature. A series of chemical treatments then engraves the produced pattern into the material underneath the photoresist. It's less commonly used in commercial production due
brand slug:
wiki
category slug:
encyclopedia
description:
Lithographic technique that uses X-rays instead of light
original url:
https://en.wikipedia.org/wiki/X-ray_lithography
date created:
date modified:
2022-12-28T17:49:06Z
main entity:
{"identifier":"Q1408939","url":"https://www.wikidata.org/entity/Q1408939"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/c/c4/XRL_Currents.svg","width":655,"height":665}
fields total:
13
integrity:
15