Virtual metrology
id:
virtual-metrology-285-4485159
title:
Virtual metrology
text:
In semiconductor manufacturing, virtual metrology refers to methods to predict the properties of a wafer based on machine parameters and sensor data in the production equipment, without performing the (costly) physical measurement of the wafer properties. Statistical methods such as classification and regression are used to perform such a task. Depending on the accuracy of this virtual data, it can be used in modelling for other purposes, such as predicting yield, preventative analysis, etc. Thi
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Virtual_metrology
date created:
date modified:
2023-11-24T22:18:30Z
main entity:
{"identifier":"Q24962984","url":"https://www.wikidata.org/entity/Q24962984"}
image:
fields total:
13
integrity:
13