Vapour phase decomposition
id:
vapour-phase-decomposition-294-487481
title:
Vapour phase decomposition
text:
Vapour phase decomposition (VPD) is a method used in the semiconductor industry to improve the sensitivity of total-reflection x-ray fluorescence spectroscopy by changing the contaminant from a thin layer to a granular residue. When using granular residue the limits of detection are improved because of a more intense fluorescence signal in angles smaller than the isokinetic angle.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Vapour_phase_decomposition
date created:
date modified:
2022-07-19T19:31:47Z
main entity:
{"identifier":"Q1495311","url":"https://www.wikidata.org/entity/Q1495311"}
image:
fields total:
13
integrity:
13