Ultra-high-purity steam for oxidation and annealing
id:
ultra-high-purity-steam-for-oxidation-and-annealing-278-17500618
title:
Ultra-high-purity steam for oxidation and annealing
text:
Ultra-high-purity steam, also called the clean steam, UHP steam or high purity water vapor, is used in a variety of industrial manufacturing processes that require oxidation or annealing. These processes include the growth of oxide layers on silicon wafers for the semiconductor industry, originally described by the Deal-Grove model, and for the formation of passivation layers used to improve the light capture ability of crystalline photovoltaic cells. Several methods and technologies can be empl
brand slug:
wiki
category slug:
encyclopedia
description:
Water vapor used in industrial processes
original url:
https://en.wikipedia.org/wiki/Ultra-high-purity_steam_for_oxidation_and_annealing
date created:
date modified:
2023-04-27T09:51:21Z
main entity:
{"identifier":"Q7880329","url":"https://www.wikidata.org/entity/Q7880329"}
image:
fields total:
13
integrity:
14