Tantalum nitride
id:
tantalum-nitride-292-13485207
title:
Tantalum nitride
text:
Tantalum nitride (TaN) is a chemical compound, a nitride of tantalum. There are multiple phases of compounds, stoichimetrically from Ta2N to Ta3N5, including TaN. As a thin film TaN find use as a diffusion barrier and insulating layer between copper interconnects in the back end of line of computer chips. Tantalum nitrides are also used in thin film resistors.
brand slug:
wiki
category slug:
encyclopedia
description:
Chemical compound
original url:
https://en.wikipedia.org/wiki/Tantalum_nitride
date created:
date modified:
2024-03-17T00:21:52Z
main entity:
{"identifier":"Q415489","url":"https://www.wikidata.org/entity/Q415489"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/b/b5/TaNstructure.jpg","width":600,"height":333}
fields total:
13
integrity:
15