SECS-I
id:
secs-i-203-5280519
title:
SECS-I
text:
The SECS-I, sometimes called SEMI E4, provide the syntactical details for communication between a semiconductor manufacturing equipment and a host machine. SECS-I works on RS 232 based serial links and define how the communications are transmitted over RS-232C. HSMS provides the corresponding specification for Ethernet-based networks.
brand slug:
wiki
category slug:
encyclopedia
description:
Standardized protocol for equipaments' communication
original url:
https://en.wikipedia.org/wiki/SECS-I
date created:
date modified:
2023-12-13T13:49:29Z
main entity:
{"identifier":"Q56291576","url":"https://www.wikidata.org/entity/Q56291576"}
image:
fields total:
13
integrity:
14