Secondary ion mass spectrometry
id:
secondary-ion-mass-spectrometry-166-3320445
title:
Secondary ion mass spectrometry
text:
Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. The mass/charge ratios of these secondary ions are measured with a mass spectrometer to determine the elemental, isotopic, or molecular composition of the surface to a depth of 1 to 2 nm. Due to the large variation in ionization probabilities among eleme
brand slug:
wiki
category slug:
encyclopedia
description:
Surface chemical analysis and imaging method
original url:
https://en.wikipedia.org/wiki/Secondary_ion_mass_spectrometry
date created:
2004-05-13T05:26:33Z
date modified:
2024-08-29T18:36:47Z
main entity:
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image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/0/06/IMS3F_pbmf.JPG","width":586,"height":417}
fields total:
13
integrity:
16