Salicide
id:
salicide-274-3833518
title:
Salicide
text:
The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure. The salicide process involves the reaction of a metal thin film with silicon in the active regions of the device, ultimately forming a metal silicide contact through a series of annealing and/or etch processes. The term "salicide" is a compaction of the phrase self-aligned silicide. The description "self-aligne
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Salicide
date created:
date modified:
2023-05-27T15:32:51Z
main entity:
{"identifier":"Q1588937","url":"https://www.wikidata.org/entity/Q1588937"}
image:
fields total:
13
integrity:
13