Rotating pocket heater
id:
rotating-pocket-heater-307-1908317
title:
Rotating pocket heater
text:
A rotating pocket heater, also called pocket heater or Kinder heater, holds and rotates a substrate during vacuum deposition. During rotation, the substrate is sequentially exposed to more than one environment, for example, heat, oxygen, metal vapor, etc. Rotating pocket heaters has been used in reactive evaporation system to create YBa2Cu3O7 layers on planar semiconductor wafers.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Rotating_pocket_heater
date created:
date modified:
2022-08-09T13:11:18Z
main entity:
{"identifier":"Q25313006","url":"https://www.wikidata.org/entity/Q25313006"}
image:
fields total:
13
integrity:
13