Phase-shift mask
id:
phase-shift-mask-235-16839809
title:
Phase-shift mask
text:
Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography. There exist alternating and attenuated phase shift masks. A phase-shift mask relies on the fact that light passing through a transparent media will undergo a phase change as a function of its optical thickness.
brand slug:
wiki
category slug:
encyclopedia
description:
Resolution-improving photomask
original url:
https://en.wikipedia.org/wiki/Phase-shift_mask
date created:
date modified:
2023-07-02T13:59:16Z
main entity:
{"identifier":"Q3297376","url":"https://www.wikidata.org/entity/Q3297376"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/e/e1/Phase-shift_illustration.png","width":485,"height":485}
fields total:
13
integrity:
15