MEMS for in situ mechanical characterization
id:
mems-for-in-situ-mechanical-characterization-275-12899801
title:
MEMS for in situ mechanical characterization
text:
MEMS for in situ mechanical characterization refers to microelectromechanical systems (MEMS) used to measure the mechanical properties of nanoscale specimens such as nanowires, nanorods, whiskers, nanotubes and thin films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded and/or co-fabricated in the microsystem, providing—in the majority of cases—greater sensitivity and precision. This level of integration and minia
brand slug:
wiki
category slug:
encyclopedia
description:
MEMS that measure mechanical properties of nanoscale objects
original url:
https://en.wikipedia.org/wiki/MEMS_for_in_situ_mechanical_characterization
date created:
date modified:
2023-12-27T08:08:36Z
main entity:
{"identifier":"Q17156536","url":"https://www.wikidata.org/entity/Q17156536"}
image:
fields total:
13
integrity:
14