MEMS electrothermal actuator
id:
mems-electrothermal-actuator-183-467516
title:
MEMS electrothermal actuator
text:
A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion. It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate. Its working principle is based on resistive heating. Fabrication processes for electrothermal actuators include deep X-ray lithography, LIGA, and deep reactive ion etching (DRIE). These techniques allow for the creation o
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/MEMS_electrothermal_actuator
date created:
2006-10-11T02:01:07Z
date modified:
2024-09-06T14:49:59Z
main entity:
{"identifier":"Q6715370","url":"https://www.wikidata.org/entity/Q6715370"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/b/b7/Electrothermal_actuator.png","width":2862,"height":1525}
fields total:
13
integrity:
15