Mask inspection
id:
mask-inspection-246-4560788
title:
Mask inspection
text:
In microtechnology, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomasks, used, e.g., for semiconductor device fabrication. Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Mask_inspection
date created:
date modified:
2023-03-17T17:04:43Z
main entity:
{"identifier":"Q6783372","url":"https://www.wikidata.org/entity/Q6783372"}
image:
fields total:
13
integrity:
13