Magnetolithography
id:
magnetolithography-200-4126865
title:
Magnetolithography
text:
Magnetolithography (ML) is a photoresist-less and photomaskless lithography method for patterning wafer surfaces. ML based on applying a magnetic field on the substrate using paramagnetic metal masks named "magnetic mask" placed on either topside or backside of the wafer. Magnetic masks are analogous to a photomask in photolithography, in that they define the spatial distribution and shape of the applied magnetic field. The fabrication of the magnetic masks involves the use of conventional photo
brand slug:
wiki
category slug:
encyclopedia
description:
Photolithographic technique
original url:
https://en.wikipedia.org/wiki/Magnetolithography
date created:
date modified:
2023-12-04T00:01:35Z
main entity:
{"identifier":"Q6731674","url":"https://www.wikidata.org/entity/Q6731674"}
image:
fields total:
13
integrity:
14