Interference lithography
id:
interference-lithography-279-1229487
title:
Interference lithography
text:
Interference lithography is a technique for patterning regular arrays of fine features, without the use of complex optical systems or photomasks.
brand slug:
wiki
category slug:
encyclopedia
description:
Technique for patterning photomasks
original url:
https://en.wikipedia.org/wiki/Interference_lithography
date created:
date modified:
2023-12-03T23:44:46Z
main entity:
{"identifier":"Q6046394","url":"https://www.wikidata.org/entity/Q6046394"}
image:
fields total:
13
integrity:
14