HARMST
id:
harmst-287-18016281
title:
HARMST
text:
HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies,
used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/HARMST
date created:
date modified:
2024-02-08T20:42:46Z
main entity:
{"identifier":"Q5628952","url":"https://www.wikidata.org/entity/Q5628952"}
image:
fields total:
13
integrity:
13