Hardmask
id:
hardmask-290-15595228
title:
Hardmask
text:
A hardmask is a material used in semiconductor processing as an etch mask instead of a polymer or other organic "soft" resist material. Hardmasks are necessary when the material being etched is itself an organic polymer. Anything used to etch this material will also etch the photoresist being used to define its patterning since that is also an organic polymer. This arises, for instance, in the patterning of low-κ dielectric insulation layers used in VLSI fabrication. Polymers tend to be etched e
brand slug:
wiki
category slug:
encyclopedia
description:
Material used in semiconductor processing
original url:
https://en.wikipedia.org/wiki/Hardmask
date created:
date modified:
2022-07-16T08:29:28Z
main entity:
{"identifier":"Q5656268","url":"https://www.wikidata.org/entity/Q5656268"}
image:
fields total:
13
integrity:
14