Electrostatic–pneumatic activation
id:
electrostatic-pneumatic-activation-276-17632483
title:
Electrostatic–pneumatic activation
text:
Electrostatic–pneumatic activation is an actuation method for shaping thin membranes for microelectromechanical and microoptoelectromechanical systems. This method benefits from operation at high speed and low power consumption. It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane-calling actuator deflects into the cavity by electrostatic pressure to compress air and increase air
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Electrostatic%E2%80%93pneumatic_activation
date created:
date modified:
2023-09-12T02:45:42Z
main entity:
{"identifier":"Q18206772","url":"https://www.wikidata.org/entity/Q18206772"}
image:
fields total:
13
integrity:
13