Electron-beam technology
id:
electron-beam-technology-290-15516385
title:
Electron-beam technology
text:
Since the mid-20th century, electron-beam technology has provided the basis for a variety of novel and specialized applications in semiconductor manufacturing, microelectromechanical systems, nanoelectromechanical systems, and microscopy.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Electron-beam_technology
date created:
date modified:
2023-08-02T16:23:39Z
main entity:
{"identifier":"Q5358163","url":"https://www.wikidata.org/entity/Q5358163"}
image:
fields total:
13
integrity:
13