Electron beam prober
id:
electron-beam-prober-276-15107103
title:
Electron beam prober
text:
The electron beam prober is a specialized adaption of a standard scanning electron microscope (SEM) that is used for semiconductor failure analysis. While a conventional SEM may be operated in a voltage range of 10–30 keV, the e-beam Prober typically operates at 1 keV. The e-beam prober is capable of measuring voltage and timing waveforms on internal semiconductor signal structures. Waveforms may be measured on metal line, polysilicon and diffusion structures that have an electrically active, ch
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Electron_beam_prober
date created:
date modified:
2021-01-13T18:40:22Z
main entity:
{"identifier":"Q5358161","url":"https://www.wikidata.org/entity/Q5358161"}
image:
fields total:
13
integrity:
13