Electron beam-induced deposition
id:
electron-beam-induced-deposition-277-1045658
title:
Electron beam-induced deposition
text:
Electron-beam-induced deposition (EBID) is a process of decomposing gaseous molecules by an electron beam leading to deposition of non-volatile fragments onto a nearby substrate. The electron beam is usually provided by a scanning electron microscope, which results in high spatial accuracy and the possibility to produce free-standing, three-dimensional structures.
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Electron_beam-induced_deposition
date created:
date modified:
2023-12-10T20:16:59Z
main entity:
{"identifier":"Q5358152","url":"https://www.wikidata.org/entity/Q5358152"}
image:
fields total:
13
integrity:
13