Dichlorosilane
id:
dichlorosilane-276-4286428
title:
Dichlorosilane
text:
Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films.
brand slug:
wiki
category slug:
encyclopedia
description:
Chemical compound
original url:
https://en.wikipedia.org/wiki/Dichlorosilane
date created:
date modified:
2023-11-07T13:49:29Z
main entity:
{"identifier":"Q418556","url":"https://www.wikidata.org/entity/Q418556"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/9/9f/Dichlorosilane-2D-stereo.png","width":1100,"height":835}
fields total:
13
integrity:
15