Coherence scanning interferometry
id:
coherence-scanning-interferometry-235-12494418
title:
Coherence scanning interferometry
text:
Coherence scanning interferometry (CSI) is any of a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. CSI is currently the most common interference microscopy technique for areal surface topography measurement. The term "CSI" was adopted by the International Organization for Standardization (
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Coherence_scanning_interferometry
date created:
date modified:
2023-06-09T19:51:14Z
main entity:
{"identifier":"Q16949712","url":"https://www.wikidata.org/entity/Q16949712"}
image:
{"content_url":"https://upload.wikimedia.org/wikipedia/commons/9/97/Coherence_scanning_interferometry_signal.jpg","width":396,"height":379}
fields total:
13
integrity:
14