Chemistry of photolithography
id:
chemistry-of-photolithography-287-7248602
title:
Chemistry of photolithography
text:
Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro- and nano- scale, typically on the surface of silicon wafers, for the production of integrated circuits, microelectromechanical systems (MEMS), solar cells, and other devices. Photolithography makes this process possible through the combined use of hexamethyldisilazane (HMDS), photoresist, spin coating, photomask, an exposure system and other
brand slug:
wiki
category slug:
encyclopedia
description:
Overview article
original url:
https://en.wikipedia.org/wiki/Chemistry_of_photolithography
date created:
date modified:
2023-07-24T07:27:13Z
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image:
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fields total:
13
integrity:
15