Atomic layer epitaxy
id:
atomic-layer-epitaxy-191-14877221
title:
Atomic layer epitaxy
text:
Atomic layer epitaxy (ALE), more generally known as atomic layer deposition (ALD), is a specialized form of thin film growth (epitaxy) that typically deposit alternating monolayers of two elements onto a substrate. The crystal lattice structure achieved is thin, uniform, and aligned with the structure of the substrate. The reactants are brought to the substrate as alternating pulses with "dead" times in between. ALE makes use of the fact that the incoming material is bound strongly until all sit
brand slug:
wiki
category slug:
encyclopedia
description:
original url:
https://en.wikipedia.org/wiki/Atomic_layer_epitaxy
date created:
date modified:
2021-05-05T18:07:23Z
main entity:
{"identifier":"Q4817336","url":"https://www.wikidata.org/entity/Q4817336"}
image:
fields total:
13
integrity:
13