Anodic bonding

id: anodic-bonding-194-11122292
title: Anodic bonding
text: Anodic bonding is a wafer bonding process to seal glass to either silicon or metal without introducing an intermediate layer; it is commonly used to seal glass to silicon wafers in electronics and microfluidics. This bonding technique, also known as field assisted bonding or electrostatic sealing, is mostly used for connecting silicon/glass and metal/glass through electric fields. The requirements for anodic bonding are clean and even wafer surfaces and atomic contact between the bonding substra
brand slug: wiki
category slug: encyclopedia
description:
original url: https://en.wikipedia.org/wiki/Anodic_bonding
date created:
date modified: 2024-04-22T15:59:46Z
main entity: {"identifier":"Q567503","url":"https://www.wikidata.org/entity/Q567503"}
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fields total: 13
integrity: 13

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